| parameter | glass wafer standard specification |
| material | glass, fused silica etc. |
| diameter | 4”, 6”, 8”, 12” etc. |
| diameter tolerance | /-0.01mm |
| mini. thk. | 0.2mm(< 6”), 0.3mm(8”), 0.35mm(12”) |
| ttv | <1μm |
| bow | <20μm |
| warp | <30μm |
| surface quality | 20-10 |
| roughness | ra<0.2nm |
| chamfer | 45°, c0.2 /-0.1mm |
| coating | ar film, reflection film, splitter film etc. |
* remark：customized is available | |